EMS TURBO SPUTTER PDF

The EMS R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8″/ mm (e.g. a wafer). The EMST S Plus is a high resolution sputter coater for oxidizing and non- oxidizing The EMS T Plus product line is a compact turbomolecular- pumped. EMS T Turbo-Pumped Sputter Coater/Carbon Coater. The EMST is a compact turbomolecular- pumped coating system suitable for SEM,. TEM and many.

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Other optional targets are available:. Instrument case mm W x mm D x mm H total height with coating head open: A gear box is included to allow the optional FTM to be used.

Intelligent system logic automatically turob which insert is in place and displays the appropriate operating settings and controls for that process. Please tick if you would like to subscribe to our newsletter.

Between 5 x 10 -3 and 1 x 10 -1 mbar.

Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use. For additional targets see Sputtering Targets section. Operating crystal frequency is in the 5 MHz to kHz operating range. Uses 57 mm diameter disc targets – still available from Quorum. Consists of high resolution turbomolecular pumped capacitive touch-screen controled sputter coater and sputtdr evaporator with status LED indicatorincluding quick release sputter insert and one TK 57mm diameter x 0.

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High resolution turbomolecular pumped capacitive touch-screen controled sputter coater with status LED indicatorincluding quick release sputter insert and one TK 57mm diameter x 0. Has six stub positions for 15 sputtter or 6.

Replaced by SC circa We promise we will not share your details with any third parties. The full range of target materials available is extensive and detailed sputtdr the Ordering Information section.

Previous Sputter Coaters and Carbon Coaters | Quorum Technologies

High vacuum carbon rod evaporation coater and metal evaporation head. For carbon supplies see: See Ordering Information for more details. The first automatic sputter coater from Polaron.

Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. Vacuum spigot allows a more convenient s;utter of the vacuum hose to the rear of the EMS T ES when bench depth is limited. SC ‘Cool’ Sputter Coater.

Includes two spare quartz crystals. A rotary planetary style stage with variable tilt angle from horizontal to 30 degrees. The stage rotation speed is variable between preset limits. Tall chamber option is available for carbon evaporation to avoid sample heating, to improve uniformity for sputtering and to hold taller samples. The EMS T T Plus uses low temperature enhanced-plasma magnetrons optimized for the turbomolecular pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.

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Full range, active vacuum gauge capable of measurement over the range of mbar to 5 x 10 -9 mbar. Aluminum Al rapidly forms an oxide layer which can be difficult to remove. Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. An early Polaron sputter coater. Overview Platforms Workstations Isolation Platforms. The maximum sputtering time is 60 minutes without breaking vacuum and with automatically built-in cooling periods.

Measurement using a full range Penning gauge. Target to stage height is variable between 0 mm and 42 mm for the standard stage. System prompts user to confirm target material and it then automatically selects appropriate parameters for that material. A range of typical sputtering and evaporation profiles are pre-installed.

Quorum Technologies

Sputtering insert Thermal evaporation insert Carbon rod evaporation insert. Fitted with three individual sputtering heads and a rotating specimen stag, it was rotary-pumped and suitable for non-oxidising metals. This ‘modification’ is used to measure and control the thickness of material deposited.